Predictive simulation of semiconductor processing [Texte imprimé] : status and challenges / J. Dabrowski, E.R. Weber (eds.) . - BerlinHeidelbergNew York : Springer, cop. 2004 . - 1 vol. (XVII-490 p.) : ill. ; 24 cm . - ( Springer series in materials science ; 72 ).

Notes bibliogr. Index p. 469-490

ISBN : 3-540-20481-4

 

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