TY  - BOOK
AU  - Dabrowski
AU  - Weber
TI  - Predictive simulation of semiconductor processing
T2  - Springer series in materials science
VL  - 72
SN  - 3-540-20481-4
PY  - 2004///
CY  - Berlin, Heidelberg, New York
PB  - Springer
KW  - Semiconductors
KW  - Simulation methods
KW  - lc
KW  - Microelectronics
KW  - Technological innovations
KW  - 027282570
KW  - Semiconducteurs
KW  - 027248763
KW  - Simulation, Méthodes de
KW  - rameau
KW  - 621.3815/2
KW  - 22
KW  - TK7871.85
KW  - P678 2004
N2  - Notes bibliogr. Index p. 469-490
items.itemcallnumber  - 622.381 52 DAB PRE
ER  -